TEL Tokyo Electron 381-639506-4限制板 PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
產(chǎn)品名稱(chēng)：TEL Tokyo Electron 381-639506-4 限制板
功能類(lèi)型：Limiter Board（信號/功率限制保護模塊）
一、主要功能
控制和限制電壓、電流或信號幅度，防止設備因超出額定參數而損壞
提供過(guò)載保護與信號鉗制功能，確保系統穩定運行
支持與主控系統或I/O接口板協(xié)同工作，進(jìn)行實(shí)時(shí)保護與異常切斷
二、典型應用領(lǐng)域
半導體設備內部保護系統
用于TEL設備中對關(guān)鍵控制信號的安全限制
防止電源、電信號、電磁波等干擾引起設備異常
離子注入設備（Ion Implanter）
對高能束流或高壓組件進(jìn)行電流/電壓限制
保護離子源、控制電極及目標晶圓區的安全
等離子體刻蝕設備（Plasma Etcher）
限制高頻信號輸入，避免對RF電路產(chǎn)生干擾或損傷
薄膜沉積設備（如CVD、ALD系統）
保障等離子源、電加熱系統、氣體傳感器的工作電壓范圍安全
光刻設備（Photolithography）
限制曝光系統的電氣負載，保護光源驅動(dòng)電路
溫控與真空控制單元
限制反饋控制信號范圍，避免因傳感器故障導致溫度或真空異常變化
三、應用優(yōu)勢
避免瞬態(tài)電流或電壓沖擊造成的設備損壞
延長(cháng)設備關(guān)鍵部件壽命
提高生產(chǎn)工藝穩定性，提升良率
實(shí)現與TEL設備高度匹配的安全防護機制
英文資料：
Product Name: TEL Tokyo Electron 381-639506-4 Restriction Board
Function type: Limiter Board (signal/power limit protection module)
1、 Main functions
Control and limit voltage, current, or signal amplitude to prevent equipment damage due to exceeding rated parameters
Provide overload protection and signal clamping functions to ensure stable system operation
Support collaboration with the main control system or I/O interface board for real-time protection and abnormal disconnection
2、 Typical application areas
Internal protection system for semiconductor equipment
Used for safety restrictions on critical control signals in TEL devices
Prevent equipment abnormalities caused by interference from power sources, electrical signals, electromagnetic waves, etc
Ion implantation equipment
Limiting the current/voltage of high-energy beams or high-voltage components
Protecting the safety of ion sources, control electrodes, and target wafer areas
Plasma Etcher equipment
Limit high-frequency signal input to avoid interference or damage to RF circuits
Thin film deposition equipment (such as CVD, ALD systems)
Ensure the safe working voltage range of plasma sources, electric heating systems, and gas sensors
Photolithography equipment
Limit the electrical load of the exposure system and protect the light source drive circuit
Temperature control and vacuum control unit
Limit the range of feedback control signals to avoid abnormal temperature or vacuum changes caused by sensor failures
3、 Application advantages
Avoid equipment damage caused by transient currents or voltage surges
Extend the lifespan of critical components in equipment
Improve production process stability and increase yield
Implement a security protection mechanism that highly matches TEL devices
2.產(chǎn) 品 展 示
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