Novellus Systems 02-00315-01接口模塊 PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
Novellus Systems 02-00315-01 接口模塊 是一款用于半導體制造設備的關(guān)鍵電子組件，主要用于在控制系統與外部設備之間進(jìn)行信號和數據傳輸。該模塊通常用于 Novellus 的沉積設備（如 PECVD、SACVD、HDPCVD 或金屬沉積系統）中，起著(zhù)“橋梁”作用。
一、基本信息
產(chǎn)品名稱(chēng)：接口模塊（Interface Module）
型號：02-00315-01
制造商：Novellus Systems Inc.（已被 Lam Research 收購）
用途：連接主控制系統與外圍傳感器、執行器、通信總線(xiàn)等，完成 I/O 映射和信號處理。
二、功能特點(diǎn)
I/O 接口管理：提供數字/模擬輸入輸出通道，允許設備控制器與外圍設備通信。
信號隔離：內置隔離保護，防止靜電或電氣干擾影響核心控制邏輯。
模塊化設計：支持熱插拔或便捷更換，適用于多種 Novellus 工藝平臺。
數據中繼：可能作為中間節點(diǎn)與 PLC、計算機、傳感器、執行機構之間傳遞命令和反饋。
三、典型應用設備
此類(lèi)接口模塊多應用于 Novellus Systems 的以下設備系列中：
Concept One/Two/Three 系列：廣泛用于 CVD 工藝。
Speed 系列系統：用于高通量沉積工藝。
ALTUS 系列：原子層沉積（ALD）設備。
英文資料：
The Novellus Systems 02-00315-01 interface module is a critical electronic component used in semiconductor manufacturing equipment, primarily for signal and data transmission between control systems and external devices. This module is typically used in Novellus deposition equipment such as PECVD, SACVD, HDPCVD, or metal deposition systems, serving as a "bridge".
1、 Basic Information
Product Name: Interface Module
Model: 02-00315-01
Manufacturer: Novellus Systems Inc. (acquired by Lam Research)
Purpose: To connect the main control system with peripheral sensors, actuators, communication buses, etc., and complete I/O mapping and signal processing.
2、 Functional Features
I/O interface management: Provides digital/analog input/output channels, allowing device controllers to communicate with peripheral devices.
Signal isolation: Built in isolation protection to prevent static electricity or electrical interference from affecting the core control logic.
Modular design: supports hot swapping or easy replacement, suitable for multiple Novellus process platforms.
Data relay: may act as an intermediate node to transmit commands and feedback between PLCs, computers, sensors, and actuators.
3、 Typical application devices
This type of interface module is commonly used in the following device series of Novellus Systems:
Concept One/Two/Tree series: widely used in CVD processes.
Speed series system: used for high-throughput deposition processes.
ALTUS series: Atomic Layer Deposition (ALD) equipment.
2.產(chǎn) 品 展 示
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