Tokyo Electron RPC-T0051A-11輸入輸出模塊 PDF資料
1.產(chǎn) 品 資 料 介 紹:
中文資料:
TEL Tokyo Electron RPC-T0051A-11 輸入輸出模塊 是一款用于半導體制造設備中的I/O信號控制板,屬于東京電子公司設備的關(guān)鍵電子模塊之一。該模塊主要用于在設備的控制系統與外部執行部件之間進(jìn)行輸入/輸出信號的采集與分發(fā),是保障設備自動(dòng)化運行的重要部件。
一、產(chǎn)品功能
信號傳輸與邏輯控制
實(shí)現控制系統對設備執行機構(如電機、氣缸、閥門(mén)等)的控制信號輸出;
接收來(lái)自傳感器或設備狀態(tài)反饋部件的輸入信號,上傳至主控制器。
電氣隔離與保護
具備電氣隔離功能,可有效保護主控電路免受外部信號干擾或過(guò)載影響;
提供過(guò)流、過(guò)壓等基礎保護功能,確保設備穩定運行。
模塊化接口
采用標準接口,可方便地進(jìn)行安裝、更換或維護;
支持多通道輸入輸出,適配復雜的控制需求。
二、應用領(lǐng)域
晶圓前道處理設備
常用于TEL的Clean Track、ACT、Lithius等系列設備中;
用于涂膠、顯影、清洗等工序的控制與監測。
自動(dòng)化控制系統
應用于設備中運動(dòng)部件(如機械臂、輸送機構等)的信號控制與反饋;
控制真空系統、壓力閥、門(mén)鎖等輔助設備的操作。
半導體制造工廠(chǎng)
在12英寸、8英寸晶圓產(chǎn)線(xiàn)中作為核心控制模塊運行;
支持全天候高負載運行,對環(huán)境穩定性要求較高。
設備維護與升級
作為易損電子模塊,可在系統出現通信或控制故障時(shí)獨立更換;
支持舊型號設備的持續維修與技術(shù)延長(cháng)使用周期。
英文資料:
The TEL Tokyo Electron RPC-T0051A-11 input/output module is an I/O signal control board used in semiconductor manufacturing equipment and is one of the key electronic modules of Tokyo Electronics Corporation's equipment. This module is mainly used for collecting and distributing input/output signals between the control system of the device and external executing components, and is an important component to ensure the automated operation of the device.
1、 Product Features
Signal transmission and logic control
Realize the control signal output of the control system for equipment actuators (such as motors, cylinders, valves, etc.);
Receive input signals from sensors or device status feedback components and upload them to the main controller.
Electrical isolation and protection
Equipped with electrical isolation function, it can effectively protect the main control circuit from external signal interference or overload effects;
Provide basic protection functions such as overcurrent and overvoltage to ensure stable operation of the equipment.
Modular interface
Using standard interfaces for easy installation, replacement, or maintenance;
Support multi-channel input and output, adapt to complex control requirements.
2、 Application Fields
Wafer pre-processing equipment
Commonly used in TEL's Clean Track, ACT, Lithium and other series of equipment;
Used for controlling and monitoring processes such as gluing, developing, and cleaning.
automatic control system
Used for signal control and feedback of moving parts in equipment, such as robotic arms and conveyor mechanisms;
Control the operation of auxiliary equipment such as vacuum systems, pressure valves, door locks, etc.
Semiconductor manufacturing factory
Operate as the core control module in 12 inch and 8-inch wafer production lines;
Supports high load operation 24/7, with high requirements for environmental stability.
Equipment maintenance and upgrade
As a vulnerable electronic module, it can be independently replaced in the event of communication or control failures in the system;
Support continuous maintenance and technical extension of the service life of old model devices.
2.產(chǎn) 品 展 示
3.其他產(chǎn)品
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BENTLY 1900/55 190055-0Z-01-01-01地震監測模塊
4.其他英文產(chǎn)品
ASEA DSQC100 connector backplane
ASEA 2668 184-447 Communication Module
RadiSys 61-0475-12 Axis Control Module
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073-404227-00 | 6DD1684-0DB2 | 6DD1684-0GH0 |
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