Tokyo Electron XPC-T0090A-11接口板 PDF資料
1.產(chǎn) 品 資 料 介 紹:
中文資料:
產(chǎn)品名稱(chēng): TEL Tokyo Electron XPC-T0090A-11 接口板
產(chǎn)品類(lèi)型: 信號接口模塊 / 控制板卡
一、產(chǎn)品應用領(lǐng)域
半導體設備控制系統
用于蝕刻、CVD、PVD、清洗等設備中,實(shí)現主控系統與傳感器、執行器的信號接口功能。晶圓處理與傳輸模塊
應用于晶圓搬運單元(如Load Port、機器人臂),用于信號傳輸與狀態(tài)反饋。自動(dòng)化設備的輸入/輸出接口
連接多路數字或模擬I/O信號,用于系統狀態(tài)檢測和控制指令輸出。真空系統與工藝環(huán)境控制
在設備真空腔體或氣體系統控制中用于監控與調節信號交互。多模塊間通信橋接
支持不同模塊或子系統之間的總線(xiàn)通信、數據同步,確保整體協(xié)調運行。
英文資料:
Product Name: TEL Tokyo Electron XPC-T0090A-11 Interface Board
Product Type: Signal Interface Module/Control Board
1、 Product application areas
Semiconductor equipment control system
Used for etching CVD、PVD、 Implement signal interface functions between the main control system, sensors, and actuators in cleaning and other equipment.
Wafer Processing and Transport Module
Applied to wafer handling units (such as load ports, robot arms) for signal transmission and status feedback.
Input/output interface of automation equipment
Connect multiple digital or analog I/O signals for system status detection and control instruction output.
Vacuum System and Process Environment Control
Used for monitoring and regulating signal interaction in equipment vacuum chambers or gas system control.
Multi module communication bridging
Support bus communication and data synchronization between different modules or subsystems to ensure overall coordinated operation.
2.產(chǎn) 品 展 示
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PMA43R-10100-00 | IEPAF02 | PFTL101AE-1.0KN 3BSE004212R1 1.0KN |
PMA43Q-Y0100-02 | AMAT 0100-90554 | PFTL101B-10KN 3BSE004197R1 |
PMA43Q-10100-00 | NKTU116 | PFTL101AER-0.5KN 3BSE023010R1 |
PMA43Q-00100-00 | 07AA63 | PFTL101B 50KN |
PMA43P-11100-00 | ICSO16N1 | PFTL-101B 5KN 3BSE00418SR1 |
PMA43P-10100-00 | AMAT 0100-09131 | PFTL101B-2.0KN 3BSE004185R1 2.0KN |
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