TEL Tokyo Electron 3281-000172-13輸入/輸出接口 PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
Tokyo Electron 3281-000172-13 輸入/輸出接口模塊 — 產(chǎn)品應用領(lǐng)域
該模塊是Tokyo Electron（TEL）用于半導體制造設備中的一種關(guān)鍵電子組件，主要負責控制系統與現場(chǎng)設備之間的輸入與輸出信號交互。其典型應用領(lǐng)域包括以下幾方面：
半導體制造設備控制系統
用于各種半導體設備，如刻蝕機、CVD（化學(xué)氣相沉積）、PVD（物理氣相沉積）、清洗機和擴散爐中，實(shí)現對工藝流程中各類(lèi)傳感器、執行器、電磁閥等部件的數字/模擬信號輸入輸出。設備內部信號集成接口
作為主控制板和外圍功能模塊（如真空泵控制、電源監控、運動(dòng)控制系統）之間的數據通道，實(shí)現穩定快速的數據通信。自動(dòng)化系統中的I/O控制
應用于TEL設備自動(dòng)化控制系統中，如真空艙體開(kāi)關(guān)控制、氣體流量調節、電源狀態(tài)監控等場(chǎng)景。設備狀態(tài)監測與遠程診斷
支持輸入/輸出狀態(tài)采集，配合TEL上位機診斷系統用于故障檢測和預防性維護。晶圓搬運與處理系統
可用于控制晶圓搬運裝置、對準系統或傳送系統，實(shí)現信號控制與位置確認反饋。潔凈室設備接口擴展
適用于位于潔凈環(huán)境中的模塊化生產(chǎn)設備，通過(guò)該接口模塊實(shí)現設備間模塊通信、環(huán)境參數采集及信號同步。
英文資料：
Tokyo Electron 3281-000172-13 Input/Output Interface Module - Product Application Fields
This module is a key electronic component used by Tokyo Electron (TEL) in semiconductor manufacturing equipment, mainly responsible for the input and output signal interaction between the control system and field devices. Its typical application areas include the following:
Semiconductor manufacturing equipment control system
Used in various semiconductor devices, such as etching machines, CVD (chemical vapor deposition), PVD (physical vapor deposition), cleaning machines, and diffusion furnaces, to achieve digital/analog signal input and output of various sensors, actuators, solenoid valves, and other components in the process flow.
Internal signal integration interface of the device
As a data channel between the main control board and peripheral functional modules (such as vacuum pump control, power monitoring, motion control system), it achieves stable and fast data communication.
I/O Control in Automation Systems
Applied in TEL equipment automation control systems, such as vacuum chamber switch control, gas flow regulation, power status monitoring, and other scenarios.
Equipment status monitoring and remote diagnosis
Support input/output status collection, in conjunction with TEL upper computer diagnostic system for fault detection and preventive maintenance.
Wafer Handling and Processing System
Can be used to control wafer handling devices, alignment systems, or conveyor systems, achieving signal control and position confirmation feedback.
Expansion of cleanroom equipment interfaces
Suitable for modular production equipment located in clean environments, this interface module enables inter device module communication, environmental parameter acquisition, and signal synchronization.
2.產(chǎn) 品 展 示
3.其他產(chǎn)品
4.其他英文產(chǎn)品
GE D20 EME 10BASE-T Digital Control Modu
RADISYS 451558-004 Communication Module
ABB UN0942b-P Programmable Controller
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| PMB31D-10100-03 | NKLS110 | 3BSX426978R2 DSTK 150 |
| PMB31D-10100-02 | 07ZG60R1 | PFTL101A 0.5KN 3BSE004160R1 |
| PMB31D-10100-01 | IMFAI01 | 3BUP001191R1 CI545V01 |
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