TEL Tokyo Electron 381-500244-3內存板 PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
TEL Tokyo Electron 381-500244-3 內存板
產(chǎn)品應用領(lǐng)域簡(jiǎn)述：
一、應用領(lǐng)域
半導體制造設備主控系統
用于Tokyo Electron設備中的主控單元，協(xié)助處理控制命令和工藝程序。
數據緩存與臨時(shí)存儲
在設備運行過(guò)程中臨時(shí)緩存圖像數據、工藝配方、傳感器信號等，支持實(shí)時(shí)響應。
設備運行配方管理
存儲和調用各類(lèi)工藝配方（Recipe），保障快速、高效切換不同工藝流程。
報警與狀態(tài)日志記錄
設備運行產(chǎn)生的狀態(tài)變化、報警信息可臨時(shí)保存在內存中，供系統調用與維護分析。
與人機界面（HMI）的數據交互支持
協(xié)助HMI系統實(shí)時(shí)顯示設備狀態(tài)、輸入輸出操作結果。
二、典型應用設備
TEL 蝕刻設備（如 Telius 系列）
TEL 化學(xué)氣相沉積設備（如 Unity 系列）
TEL 濕法清洗設備（如 Expedius 系列）
TEL 涂膠/顯影設備（如 Mark Vz 系列）
三、技術(shù)特點(diǎn)（概述）
工業(yè)級PCB內存板，適應高潔凈、高溫控制環(huán)境
與TEL主控模塊高速連接，執行臨時(shí)數據處理任務(wù)
具備多通道存取能力，提升數據吞吐效率
可靠性高，支持長(cháng)時(shí)間不間斷運行
英文資料：
TEL Tokyo Electron 381-500244-3 Memory Board
Product application field description:
1、 Application Fields
Main control system for semiconductor manufacturing equipment
Used as the main control unit in Tokyo Electron devices to assist in processing control commands and process programs.
Data caching and temporary storage
Temporarily cache image data, process formulas, sensor signals, etc. during device operation, supporting real-time response.
Equipment operation formula management
Store and call various process recipes to ensure fast and efficient switching between different process flows.
Alarm and status logging
The state changes and alarm information generated by device operation can be temporarily saved in memory for system call and maintenance analysis.
Data interaction support with human-machine interface (HMI)
Assist the HMI system in displaying device status and input/output operation results in real-time.
2、 Typical application devices
TEL etching equipment (such as Telius series)
TEL chemical vapor deposition equipment (such as Unity series)
TEL wet cleaning equipment (such as Expediaus series)
TEL coating/developing equipment (such as Mark Vz series)
3、 Technical Features (Overview)
Industrial grade PCB memory board, suitable for high cleanliness and high temperature control environment
Connect with TEL main control module at high speed to perform temporary data processing tasks
Capable of multi-channel access, improving data throughput efficiency
High reliability, supporting long-term uninterrupted operation
2.產(chǎn) 品 展 示
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